POINT SENSORS – INTERFEROMETER FOR THICKNESS MEASUREMENT

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INTERFEROMETER FOR THICKNESS MEASUREMENT

A white light interferometer measures the thickness of transparent materials and fims. It is based on the CHR controllers and can be combined with a CHR sensor head. Various infrared interferometers are available for measuring wafer thickness as well as glue and epoxy fims.

On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.

MODEL RESOLUTION MEASUREMENT RANGE WORKING DISTANCE SPOT SIZE
INT-180 (WL) 0.01 µm 3 µm - 180 µm 9.5 mm

10 µm

IT-500 (IR) 0.14 µm 37 µm - 4700 µm 39.7 mm

13 µm

IT-500 RW (IR) 0.17 µm 45 µm - 5600 µm 39.7 mm

13 µm

IT-1000 (IR) 0.25 µm 64 µm - 8200 µm 39.7 mm

13 µm

IT-1000 RW (IR) 0.22 µm 57 µm - 7300 µm 39.7 mm

13 µm

IT 18-3000 (IR) 0.09 µm 18 µm - 3000 µm 39.7 mm

13 µm

IT 150-15000 0.45 µm 150 µm - 15000 µm 39.7 mm

13 µm

IT TW (IR) 0.01 µm 4 µm - 300 µm 39.7 mm

13 µm

IT DW (IR) 0.06 µm 15 µm - 2000 µm 39.7 mm

13 µm

 

 

 


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POINT SENSORS – INTERFEROMETER FOR THICKNESS MEASUREMENT









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