POINT SENSORS INTERFEROMETER FOR THICKNESS MEASUREMENT

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INTERFEROMETER FOR THICKNESS MEASUREMENT

A white light interferometer measures the thickness of transparent materials and fims.It is based on the CHR controllers and can be combined with a CHR sensor head.Various infrared interferometers are available for measuring wafer thickness as well asglue and epoxy fims.

On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.

MODEL RESOLUTION MEASUREMENT RANGE WORKING DISTANCE SPOT SIZE
INT-180 (WL) 0.01 m 3 m - 180 m 9.5 mm

10 m

IT-500 (IR) 0.14 m 37 m - 4700 m 39.7 mm

13 m

IT-500 RW (IR) 0.17 m 45 m - 5600 m 39.7mm

13 m

IT-1000 (IR) 0.25 m 64 m - 8200 m 39.7mm

13 m

IT-1000 RW (IR) 0.22 m 57 m - 7300 m 39.7mm

13 m

IT 18-3000 (IR) 0.09 m 18 m - 3000 m 39.7mm

13 m

IT 150-15000 0.45 m 150 m - 15000 m 39.7mm

13 m

IT TW (IR) 0.01 m 4 m - 300 m 39.7mm

13 m

IT DW (IR) 0.06 m 15 m - 2000 m 39.7mm

13 m


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POINT SENSORS INTERFEROMETER FOR THICKNESS MEASUREMENT









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