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3D WHITE LIGHT INTERFEROMETER
The 3D white light interferometers are available with 3 measurement ranges: 100 µm, 250 µm and 400 µm. The resolution in z-direction is 0.1 nm.
The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.
|OBJECTIVE||Z-RESOLUTION||XY RESOLUTION||FIELD OF VIEW||WORKING DISTANCE|
|2.5X||1 nm||9.24 µm||7.12 mm x 5.34 mm||
|4.62 µm||3.56 mm x 2.67 mm||9.3 mm|
|10X||1 nm||2.31 µm||1.78 mm x 1.34 mm||
|20X||0.1 nm||1.16 µm||0.89 mm x 0.66 mm||
|50X||0.1 nm||0.46 µm||0.36 mm x 0.27 mm||
|100X||0.1 nm||0.23 µm||0.18 mm x 0.13 mm||
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