AREA SENSORS 3D WHITE LIGHT INTERFEROMETER

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3D WHITE LIGHT INTERFEROMETER

The 3D white light interferometers are available with 3 measurement ranges:100 m, 250 m and 400 m. The resolution in z-direction is 0.1 nm.

The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.

OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
2.5X 1 nm 9.24 m 7.12 mm x 5.34 mm

10.3 mm

5X

1 nm

4.62 m 3.56 mm x 2.67 mm 9.3 mm
10X 1 nm 2.31 m 1.78 mm x 1.34 mm

7.4 mm

20X 0.1 nm 1.16 m 0.89 mm x 0.66 mm

4.7 mm

50X 0.1 nm 0.46 m 0.36 mm x 0.27 mm

3.4 mm

100X 0.1 nm 0.23 m 0.18 mm x 0.13 mm

2.0 mm


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AREA SENSORS 3D WHITE LIGHT INTERFEROMETER









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