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CT 300 - Non Contact Profilometer
- Large 315 mm x 315 mm scanning area
The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12? wafers or other large substrates and parts. It is ideal for measuring flatness with sub-micron accuracy over the complete 315 mm travel. Using a chromatic white light sensor and a data collection rate of up to 4 kHz the inspection time is minimized. The sensors are available with a resolution down to 3 nm and a measurement range up to 25 mm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.
- Fast and accurate magnetic linear motors
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